PORTLAND, Ore. (AP) — Weeks after Immigration and Customs Enforcement issued a series of subpoenas demanding information about incarcerated immigrants in Oregon, only one law enforcement agency has said it complied with the demands.

The subpoenas are part of a broad and escalating battle between state and federal governments over sanctuary laws and immigrant rights.

Federal authorities issued a spate of subpoenas in February to several Oregon agencies, including the Washington County Sheriff’s Office, the Clackamas County Sheriff’s Office, the Hillsboro Police Department and the Oregon State Police. The subpoenas had a March 3 deadline.

Washington County complied, while Hillsboro has initially refused. The Hillsboro Police Department, as well as other agencies, are still reviewing the legality of the subpoenas, in light of what they see as contradictions between state and federal laws.

Oregon has a statewide sanctuary law that limits cooperation between local enforcement agencies and federal immigration enforcement.